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Piezoelectric MEMS Resonators
Gianluca Piazza , Harmeet Bhugra
- Widely-used piezoelectric materials, as well as materials in which there is emerging interest
- Principle of operation and design approaches for the making of flexural, contour-mode, thickness-mode, and shear-mode piezoelectric resonators, and examples of practical implementation of these devices
- Large scale manufacturing approaches, with a focus on the practical aspects associated with testing and qualification
- Examples of commercialization paths for piezoelectric MEMS resonators in the timing and the filter markets
- ...and more!
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