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IntroductionEvolution of MEMSApplications of MEMSBioMEMS ApplicationsMEMS ResourcesText Goals and OrganizationMiniaturization and ScalingBioMEMS MaterialsTraditional MEMS and Microelectronic MaterialsPolymeric Materials for MEMSBiomaterialsMicrofabrication Methods and Processes for BioMEMSIntroductionMicrolithographyDopingMicromachiningWafer Bonding, Assembly, and PackagingSurface TreatmentConversion Factors for Energy and Intensity UnitsLaboratory ExercisesMicrofluidicsIntroduction and Fluid PropertiesConcepts in MicrofluidicsFluid-Transport Phenomena and PumpingFlow ControlLaboratory ExercisesLab-on-a-Chip or Micro Total Analysis SystemsMicroanalytical Systems in Chemistry and BiologySample PretreatmentSample IntroductionSeparationsSensing and Detection MethodsSensing and DetectionSensor CharacteristicsPrinciples of Physical SensingBiological and Chemical Detection MethodsApplications to Cells, Nucleic Acids, and ProteinsCellsNucleic AcidsProteinsClinical MonitoringFlow CytometryMicrodialysisCatheter-Based SensorsEndoscopyPoint of CareMEMS Implants and Bioelectric InterfacesImplantable MEMSMicroelectrodes and Neural ProbesImplantable SensorsDrug DeliveryTissue EngineeringIndexProblems and References appear at the end of each chapter.
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